| Customization: | Available |
|---|---|
| After-sales Service: | Free Installing and Training, Technical Support |
| Warranty: | One Year Warranty |
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Mode | HCEB-600 | HCEB-900 | HCEB-1100 | HCEB-1350 | HCEB-1550 | HCEB-1800 | HCEB-2350 | HCEB-2700 |
Size(mm) | 600x800 | 900x1100 | 1100x1520 | 1350x1610 | 1550x1810 | 1800x1850 | 2350x1510 | 2700x1850 |
Dome(mm) | 450 | 750 | 950 | 1200 | 1400 | 1600 | 2250 | 2640 |
Rotational Speed | 10-60rpm(variable) | |||||||
Thickness Monitor | Quartz Crystal or Optical Monitor | |||||||
Ion Source | RF/Kaufman-type/End-hall-type Ion beam Source | |||||||
Evaporation | E-Beam Source(Dual source co steaming optional), Multi-point crucible hearth or annular hearth, Thermal source | |||||||
Wavelength | 300-1560 | 380-780 | ||||||



















