| Customization: | Available |
|---|---|
| After-sales Service: | Free Installing and Training, Technical Support |
| Warranty: | One Year |
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Mode | HCCA-2230 | HCCA-2235 | HCCA-2245 | HCCA-2345 | HCCA-2545 |
Size | 2200×H3000mm | 2200×H3500mm | 2200×H4500mm | 2300×H4500mm | 2500×H4500mm |
Structure | Vertical front door structure is equipped with air extraction system and water cooling system | ||||
Vacuum system | Mechanical pump+Roots pump+diffusion pump/Turbo molecular pump+holding pump | ||||
Vacuum measurement system | Pirani + cold cathode + film gauge | ||||
Coating system | Arc evaporation source,coating auxiliary ion dedicated power supply | ||||
Inflation system | Mass flowmeter | ||||
Power supply | DC power supply, intermediate frequency power supply, pulse power supply (bias power supply, arc power supply) | ||||
Alarm and protection | Alarm for water shortage, over-current, over-voltage, open circuit and other abnormal conditions of pump and target, and implement corresponding protection measures and electrical interlocking function | ||||
Working baking temperature | Normal temperature to 450 ℃ controllable and adjustable (PID temperature control) | ||||
Supply index | Pressure 0.5-0.8MPa, Water temperature ≤25℃, Hydraulic pressure ≥0.2MPa | ||||
Ultimate vacuum | 5.0x10-4Pa | 5.0x10-4Pa | 5.0x10-4Pa | 5.0x10-4Pa | 5.0x10-4Pa |
Total power | 185-200KW | 185-200KW | 185-200KW | 185-200KW | 185-200KW |
Remarks | It can be customized according to customer requirements. | ||||


















