Customization: | Available |
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After-sales Service: | Free Installing and Training , Technical Support, |
Warranty: | One Year Limited Warranty |
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Mode Dimension |
JTL-900 | JTL-1100 | JTL-1250 |
900*1000mm | 1100*1000mm | 1250*1100mm | |
Coating mode and main confirguration |
Six multi-arc targets + one set of column targets + one set of plane rectangle magnetron sputtering targets |
Six multi-arc targets + a pair of twin (MF)magnetron sputtering targets |
Twelve multi-arc targets + two sets of plane rectangle magnetron sputtering targets + a pair of twin (MF)magnetron sputtering targets |
Power source | Electric arc power, DC magnetron power, MF magnetron power, filament power, pulse power, linear ionized source. |
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Process gas control | Quality flowmeter + electromagnetism ceramic valve | ||
Vacuum chamber structure |
Vertical single(side) door, pump system postposition, double water-cooling | ||
Vacuum system |
Molecule pump +Roots pump +Mechanical pump(5.0*10-5Pa) Diffusion pump +Roots pump +Mechanical pump(5.0*10-4Pa) |
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Workpiece baking temperature |
Normal temperature to 350 centi-degree PID control, radiation heating. |
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Workpiece motion mode |
Public rotation Frequency control: 0-20 rotation per minute | ||
Measure mode | Number display composite vacuum gauge: from atmosphere to 1.0*10-5Pa | ||
Control mode | Manual/Automatic/PC/PLC + HMI/PC four choice of control mode | ||
Remark | We can design the dimension of the equipment according to customer's special technique requirement. |