| Customization: | Available |
|---|---|
| After-sales Service: | Free Installing and Training , Technical Support, |
| Warranty: | One Year Limited Warranty |
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| Model (customerize) |
HCCA-1215 | HCCA-1818 | HCCA-2236 | HCCA-2545 | HCCA-2270 |
| Dimension | D1250*H1500mm | D1800*H1800mm | D2200*H3600mm | D2500*H4500mm | D2200*H7000mm |
| Loading ability | 1000*1300mm MAX | 1500*1500mm MAX | Sheet:1250*2500mm 4 pieces/Batch |
Sheet:1250*2500mm 6 pieces/Batch |
Sheet:1250*2500mm 10 pieces/Batch |
| Machine Size | L5*W5*H2M | L6*W6*H2.5M | L6*W8*H11.5M | L8*W8*H12.5M | L20*W8*H2.5M |
| Power source | Electric-arc power, Filament power, Pulsed bias power supply | ||||
| Process gas control | Mass flowmeter + Electromagnetic ceramic valve | ||||
| Vacuum chamber structure |
Vertical top opening door or Horizontal open front door, pump system postposition, double water cooling | ||||
| Vacuum system | Diffusion pump +Roots pump +Mechanical pump(5.0*10-4Pa) | ||||
| Workpiece baking temperature | Normal temperature to 350 centi-degree PID control, radiation heating. | ||||
| Workpiece motion mode | Public rotation Frequency control: 0-20 rotation per minute | ||||
| Measure mode | Number display composite vacuum gauge: from atmosphere to 1.0*10-5Pa | ||||
| Control mode | Manual/Automatic/PC/PLC + HMI/PC four choice of control mode | ||||
| Remark | We can design the dimension of the equipment according to customer's special technique requirement. | ||||
Workshop:
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