Customization: | Available |
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After-sales Service: | Free Installing and Training, Technical Support |
Warranty: | One Year Limited Warranty |
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Mode Dimension |
LH-800 | LH-1250 | LH-1416 | LH-1618 |
800*1000mm | 1200*1500mm | 1400*1600mm | 1600*1800mm | |
Coating mode and main confirguration | Eight multi-arc targets |
Twelve multi-arc targets |
Fourteen multi-arc targets |
Twenty multi-arc targets |
Power source | Electric-arc power, Filament power, Pulsed bias power supply | |||
Process gas control | Mass flowmeter + Electromagnetic ceramic valve | |||
Vacuum chamber structure | Vertical side opening door, pump system postposition, double water cooling |
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Vacuum system | Molecule pump +Roots pump +Mechanical pump(5.0*10 -5 Pa) Diffusion pump +Roots pump +Mechanical pump(5.0*10 -4 Pa) |
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Workpiece baking temperature | Normal temperature to 350 centi-degree PID control, radiation heating. |
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Workpiece motion mode | Public rotation Frequency control: 0-20 rotation per minute | |||
Measure mode | Number display composite vacuum gauge: from atmosphere to 1.0*10 -5 Pa | |||
Control mode | Manual/Automatic/PC/PLC + HMI/PC four choice of control mode | |||
Remark | We can design the dimension of the equipment according to customer's special technique requirement. |