Customization: | Available |
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After-sales Service: | Free Installing and Training, Technical Support |
Warranty: | 1 Year |
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Mode Dimension |
JTL-900 | JTL-1100 | JTL-1300 | JTL-1600 |
Φ9001000mm | Φ11001000mm | Φ13001200 mm | Φ16001200 mm | |
Coating mode and main confirguration |
3 electric-arc+2 pairs of plane rectangular cathode | 6 electric-arc+2 pairs of cylindrical cathode | 5 electric-arc+4 pairs of cylindrical cathode | 6 electric-arc+8 pairs of cylindrical cathode |
Film Types | Metal films,Dielectric films,Compound films,Reaction films,Muti-layer function films | |||
Power source | Electric arc power supply,DC magnetron power supply,MF magnetron power supply.Pulse bias voltage power supply.ion source power supply. | |||
Process gas control | Quality flowmeter + electromagnetism ceramic valve | |||
Vacuum chamber structure | Vertical single(side) door, pump system postposition, double water-cooling | |||
Vacuum system | Molecule pump(diffusion pump)+Roots pump +Mechanical pump (8.0*10 -4 Pa) | |||
Pumping speed | Pumping time less than 15 minutes ,from atmospheric pressure to 310 -3 Pa | |||
Workpiece motion mode | Public rotation Frequency control: 0-20 rotation per minute | |||
Measure mode | Number display composite vacuum gauge: from atmosphere to 1.0*10 -5 Pa | |||
Control mode | Full automation control system PC+PLC/PC+HMI | |||
Remark | We can design the dimension of the equipment according to customers special technique requirement. |