Customization: | Available |
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After-sales Service: | Free Installing and Training, Technical Support |
Warranty: | One Year Limited Warranty |
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Mode Dimension |
LH-800 | LH-1250 | LH-1416 | LH-1618 |
800*1000mm | 1200*1500mm | 1400*1600mm | 1600*1800mm | |
Coating mode and main confirguration | Eight multi-arc targets |
Twelve multi-arc targets |
Fourteen multi-arc targets |
Twenty multi-arc targets |
Power source | Electric-arc power, Filament power, Pulsed bias power supply | |||
Process gas control | Mass flowmeter + Electromagnetic ceramic valve | |||
Vacuum chamber structure | Vertical side opening door, pump system postposition, double water cooling |
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Vacuum system | Molecule pump +Roots pump +Mechanical pump(5.0*10 -5 Pa) Diffusion pump +Roots pump +Mechanical pump(5.0*10 -4 Pa) |
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Workpiece baking temperature | Normal temperature to 350 centi-degree PID control, radiation heating. |
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Workpiece motion mode | Public rotation Frequency control: 0-20 rotation per minute | |||
Measure mode | Number display composite vacuum gauge: from atmosphere to 1.0*10 -5 Pa | |||
Control mode | Manual/Automatic/PC/PLC + HMI/PC four choice of control mode | |||
Remark | We can design the dimension of the equipment according to customer's special technique requirement. |
We developed a complete after-sales system and effective service measures. Company now owns a professional after-sales service team with more than ten experienced engineers.
ISO 9001 standard to ensure the quality can meet the customer's requirements.
Please feel free to contact us for further information!
Contact: Kelly Luo
Why a HCVAC system?
Over 3000 plants installed worldwide
Quick cycle times
High production capability with low energy consumption
More up time due to ease of loading/unloading and low maintenance
High productivity with only a single operator
Steel process chambers, built to last
Eco-friendly
Space saving design
PVD option available on all plants
1 year component warranty and 25 years minimum guaranteed working life
Complete global network of consulting, engineering and renowned after sales service