| Customization: | Available |
|---|---|
| After-sales Service: | Free Installing and Training, Technical Support |
| Warranty: | One Year Warranty |
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Mode | HCSO-1650T | HCSO-2550V | HCSO-2000F | HCSO-2500 |
Effective Area(mm) | 1650x750 | 2550x1200~1800 | 2000x1600 | 2500x1550 |
Rotational speed | 10~100RPM | 10~50RPM | ||
Plasma Source | ICP/CCP | DC/ICP/CCP | ||
Evaporation | In-line AF/AS Evaporation Source | Thermal Inline AS/AF | ||
Wavelength | 300~1560 | 300~780 | 380~780 | |




















