Customization: | Available |
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After-sales Service: | Free Installing and Training , Technical Support, |
Warranty: | One Year Limited Warranty |
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Characteristic:
The principle of the electric arc is intergrating cold cathode arc discharge self-sustained light unite pulse technique and magnetron sputtering technology, thinning the particles to improve the properties of the film. It can coat on the surface of the metal as well as nonmetal. Dimension |
LH-900 | LH-1215 | LH-1618 |
900*1000mm | 1250*1500mm | 1600*1800mm | |
Coating mode and main configurations | Eight multi-arc targets |
Fourteen multi-arc targets |
Twenty multi-arc targets |
Power source | Electric-arc power, Filament power, Pulsed bias power supply | ||
Process gas control | Mass flow meter + Electromagnetic ceramic valve | ||
Vacuum chamber structure | Vertical side opening door, pump system postposition, double water cooling | ||
Vacuum system | Diffusion pump +Roots pump +Mechanical pump(8.0*10 -4 Pa) | ||
Workpiece baking temperature | Normal temperature to 350 centi-degree PID control, radiation heating. | ||
Workpiece motion mode | Public rotation Frequency control: 0-20 rotation per minute | ||
Measure mode | Number display composite vacuum gauge: from atmosphere to 1.0*10 -5 Pa | ||
Control mode | Manual/Automatic/PC/PLC + HMI/PC four choice of control mode | ||
Remark | We can design the dimension of the equipment according to customer's special technique requirement. |