HCVAC Hardware Vacuum Coating Machine (LH-) is mainly used in flat glass, acrylic, PC, PET, plastic, metal surface to plat high-quality, multi-function metal film, electromagnetic shielding film, the reaction film composite film, transparent conductive film, antireflection (AR), reflectance-increasing film, LOW-E, etc. Our Company can make design according to your requirements, provide complete equipment, answer for the process, hand in the "key" in time.
Characteristics:
1. The equipment uses the vacuum magnetron sputtering technique, twin cathode, MF sputtering technique, and matching with advanced control systems.
2. The production process all automated, continuous. The highest temperature of the plating workpiece is up to 350 centi-degree, the temperature is zone control and adjustable.
3. The vacuum chamber materials adopts SUS 304, polishing inner vacuum chamber wall, spraying beads external vacuum chamber wall after polishing.
4. The vacuum chamber separated by an independent gate valve. The board plug valve we have designed can be cut off effectively, and stabilize the process gas. Presently only our companies in domestic have the technology to design and manufacture board plug valve, and it has better seal effective and more durability than the current flap valve.
5. The transmission adopts the magnetic targeting to promise stability. The speed of the entire production line in each section use the variable frequency adjustable speed motor to drive, the motion speed is adjustable.
| mode of dimension |
LH-800 |
LH-1000 |
LH-1250 |
| |
800*1000mm |
1000*1000mm |
1250*1500mm |
| Coating mode and main confirguration |
Eight multi-arc targets |
Ten multi-arc targets |
Twelve multi-arc targets |
| Power source |
Electric-arc power, Filament power, Pulsed bias power supply |
| Process gas control |
Mass flowmeter + Electromagnetic ceramic valve |
| Vacuum chamber structure |
Vertical side opening door, pump system postposition, double water cooling |
| Vacuum system |
Molecule pump +Roots pump +Mechanical pump(5.0*10 -5 Pa) Diffusion pump +Roots pump +Mechanical pump(5.0*10 -4 Pa) |
| Workpiece baking temperature |
Normal temperature to 350 centi-degree PID control, radiation heating. |
| Workpiece motion mode |
Public rotation Frequency control: 0-20 rotation per minute |
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