Customization: | Available |
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After-sales Service: | Free Installing and Training, Technical Support |
Warranty: | One Year Limited Warranty |
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Chamber Size | 430×1000mm |
540×1000mm |
700×1200mm |
540×1500mm |
Power supply |
DC power supply, AC power supply, RF power supply, bias power supply |
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Chamber structure |
Vertical double door, vertical single door, horizontal single dooor, pumping system |
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Pumping system |
KT800/turbo molecular pump+1200 roots pump+2X-70 mechincal pump*2sets |
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Vacuum |
5×10-6 ~1.5 x10-4 mbar |
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Pumping time | Atmosphere to 5×10-2pa< 6 Min | |||
Control system | Manal+semi automatic+full automatic integrated/ touch screen+PLC | |||
Remarks | We can design the chamber size according to the customer's requirements. |