Customization: | Available |
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After-sales Service: | Free Installing and Training, Technical Support |
Warranty: | One Year Limited Warranty |
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Type |
JTL-0910 |
JTL-1110 |
JTL-1312 |
JTL-1612 |
Coating Methods |
3 electric-arc+ 2 pairs of plane rectangular cathode |
6 electric-arc+ 2 pairs of cylindrical cathode+ a pairs of plane rectangular cathode |
5 electric-arc+ 4 pairs of cylindrical cathode+ a pairs of plane rectangular cathode |
6 electric-arc+ 8 pairs of cylindrical cathode+ a pairs of plane rectangular cathode |
Dimension of the Vacuum chamber |
Φ1000mm *900mm |
Φ1100mm *1000mm |
Φ1300mm *1200mm |
Φ1600mm *1200mm |
Film Types |
Metal films, Dielectric films, Compound films, Reaction films, Muti-layer function films |
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Power Supply |
Electric arc power supply, DC magnetron power supply, MF magnetron power supply, Pulse bias voltage power supply, ion source power supply |
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Structure of Vacuum chamber |
Pre-open vertical (single) door, postposition pump system, double water-cooling |
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Vacuum systems |
Molecule pump(diffusion pump)+ Roots pump+ Mechanical pump |
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Ultimate vacuum |
5*10 -5 Pa |
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Pumping Speed |
Pumping time less than 15 minutes, from atmospheric pressure to 3*10 -3 Pa |
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Movement of the workpiece |
Revolution/rotation, variable frequency speed adjustable |
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Baking temperature of the workpiece |
Adjustable and controllable from room temperature to 350, radiation heating |
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Control Mode |
Full automation control system PC+ PLC/PC+ HMI |
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Remark |
We can design the machine according to your workpiece and special technological requirement . |