Customization: | Available |
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After-sales Service: | Free Installing and Training, Technical Support |
Warranty: | One Year Limited Warranty |
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Mode | LH-1800 | LH-2000 | LH-3000 | LHW-2000 | LHW-3000 | LHW-4000 | LHW-5000 |
Vacuum chamber dimension | φ1800x2000 | φ2000x2000 | φ3000x3000 | φ2000x6000 | φ3000x6000 | φ4000x8000 | φ5000x10000 |
Vacuum system | Mechanical pump+Roots pump+diffusion pump/Turbo molecular pump+holding pump | ||||||
Coating system | arc evaporation source,coating auxiliary ion dedicated power supply | ||||||
Inflation system | Mass flow meter | Mass flow meter | Mass flow meter | Mass flow meter | Mass flow meter | Mass flow meter | Mass flow meter |
Control mode | Manual or automatic | Manual or automatic | Manual or automatic | Manual or automatic | Manual or automatic | Manual or automatic | Manual or automatic |
Ultimate vacuum | 5.0x10 -4 Pa | 5.0x10 -4 Pa | 5.0x10 -4 Pa | 5.0x10 -4 Pa | 5.0x10 -4 Pa | 5.0x10 -4 Pa | 5.0x10 -4 Pa |
Remark | Above machine parameters for your reference only, specific according to customers' special requirement of practical process design. |