Customization: | Available |
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After-sales Service: | Free Installing and Training, Technical Support |
Warranty: | One Year Limited Warranty |
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Mode Dimension |
LH-800 |
LH-1250 |
LH-1416 |
LH-1618 |
800*1000mm |
1200*1500mm |
1400*1600mm |
1600*1800mm |
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Coating mode and main confirguration |
Eight multi-arc targets | Twelve multi-arc targets | Fourteen multi-arc targets |
Twenty multi-arc targets |
Power source |
Electric-arc power, Filament power, Pulsed bias power supply |
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Process gas control |
Mass flowmeter + Electromagnetic ceramic valve |
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Vacuum chamber structure |
Vertical side opening door, pump system postposition, double water cooling |
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Vacuum system |
Molecule pump +Roots pump +Mechanical pump(5.0*10 -5 Pa) Diffusion pump +Roots pump +Mechanical pump(5.0*10 -4 Pa) |
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Workpiece baking temperature |
Normal temperature to 350 centi-degree PID control, radiation heating. | |||
Workpiece motion mode |
Public rotation Frequency control: 0-20 rotation per minute |
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Measure mode |
Number display composite vacuum gauge: from atmosphere to 1.0*10 -5 Pa |
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Control mode |
Manual/Automatic/PC/PLC + HMI/PC four choice of control mode |
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Remark |
We can design the dimension of the equipment according to customer's special technique requirement. |