Customization: | Available |
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After-sales Service: | Free Installing and Training, Technical Support |
Warranty: | One Year Limited Warranty |
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Mode |
LH-1000 | LH-1150 | LH-1200 | LH-1600 | |
mension | 1000×1200 | 1150×1200 | 1200×1300 | 1600×1800 | 1600×2200 |
Coating | Gold TiN, black TiC, rainbow TiO, wear resistant coating, supper hard coating, DLC coating, metal decorative coating and so on | ||||
Power supply system | DC power supply, MF power supply, arc power supply,filament power supply,activation of the power supply, pulsed bias power supply | ||||
Target type | Multi-arc target, MF twin targets or plane target as options | ||||
Vacuum chamber structure | Vertical front door(Double water jacket type cooling or sink type cooling),the rear air exhaust system | ||||
Vacuum system | Mechanical pump+Roots pump+diffusion pump/Turbo molecular pump+holding pump | ||||
Heating system | Normal temperature to 350 centi-degree adjustable and controllable (PID control), radiation heating by stainless steel heating pipe | ||||
Inflation system | Mass flow control(1-4 road) | ||||
Ultimate vacuum | 6×10- 4 pa(no-load,cleaning room) | ||||
Vacuum time | Pumping time less than 13 minutes ,from atmospheric pressure to 310 -3 Pa mo-load | ||||
Pressure maintaining rate | 1h≤0.6pa | ||||
Workpiece rotation | Up rotate or bottom rotate + common rotation frequency conversion stepless controlable and adjustable, 0 to 20 RPM | ||||
Control mode | Manual+semi automatic/touch screen+PLC | ||||
Remark | Vacuum chamber size can be customized according to the requirements of customers products and special process |