| Customization: | Available |
|---|---|
| After-sales Service: | Free Installing and Training, Technical Support |
| Warranty: | One Year Limited Warranty |
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HCVAC Inline coating system based on our proprietary large-area coating technology. As the coater is very iwde and can therefore process many substrates at the same time,it is especially suited for high productivity applications at very low costs, it is suited for large area glass substrates. HCVAC already delivered coating system to many glass manufacturers.
HIGHEST ECONMOY OF SCALE:
Due to it's large width.the productivity of the tool is exceptionally high while the process utilization is brought to a maximum. Based in China, HCVAC can offer the best cost of ownership by providing applicable econnomy of scale.
Process chamber:
The process chamber can be equipped with give or more different process stations in a sputter down arrangement. it enables simultaneous processing of different material compositions from metallic and ceramic targets.
Technical data
Substrate:GLASS
SIZE:2000MM*2400MM
Application:LCD Panel,CIGS Thin-film photovoltaics,CdTe thin-film photovoltaics,Organic Photovoltaics
Target:ITO,SIO,TIO,ZNO,CRO,AZO,GZO,IGZO,METAL
Power source:DC,PULSED DC or MF
Magntron type: Planar,single or dual rotatable
Type of transport: INLINE
Orientation of substrate during deposition: horizontal,LEL,SEL
System control: PLC
System dimensions: Min 20m*16.5m*3.5m
1. Large size chamber and large size glass applicable
2.High efficient cathode manufacturing technology
3. Partical control technology and film uniformity securing technology
We can do nonstandard size and application according to customer's requirements
Breakthrough Innovation and Technology
1. Coating based on the world's most popular rotating cathode, sputtering rate greatly increased, while usage of target has increased by 200% or more. Effectively reducing the production cost.
2. Using the most advanced infrared heating system in the world, the system can achieve short heating time,fast heating up, energy consumption is less than 1/3 of conventional heating pipe. The ordinary heat pipe vacuum chamber evenly heated to 400 °C need 2-3 hours at least with constantly heated.However, because of the special circumstances of the vacuum chamber and infrared heating tube targeted design, you can complete vacuum chamber preheating process within 1-1.5 hours.
| Mode Dimension |
ZZ-1214 | ZZ-1416 | ZZ-1618 | ZZ-1820 |
| 1200*1400mm | 1400*1600mm | 1600*1800mm | 1800*2000mm | |
| Film Type | Semitransparent film, non-conducting film, gold, silver, red, blue, green, purple, seven color, etc. | |||
| Power source Type | Thermal evaporation power, ion bombard power, RF power | |||
| Vacuum chamber structure | Vertical double/single door, horizontal single door, pump system postposition | |||
| Ultimate vacuum | 8.0*10 -4 Pa | |||
| Vacuum system | Diffusion pump +Roots pump +Mechanical pump +Holding pump | |||
| Pump time | Pump from atmosphere to 5.0*10 -2 ,6 minutes | |||
| Workpiece motion mode | Public rotation/Frequency control | |||
| Control mode | Manual/Automatic all-in-one mode, Touching screen+PLC | |||
| Remark | We can design the dimension of the vacuum chamber according to customers demand. | |||
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