Customization: | Available |
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After-sales Service: | Free Installing and Training , Technical Support, |
Warranty: | One Year Limited Warranty |
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Mode Dimension |
JTL-900 | JTL-1100 | JTL-1250 |
900*1000mm | 1100*1000mm | 1250*1500mm | |
Coating mode and main confirguration |
Six multi-arc targets + one set of column targets + one set of plane rectangle magnetron sputtering targets |
Six multiarc targets + a pair of twin (MF)magnetron sputtering targets |
Twelve multi-arc targets + two sets of plane rectangle magnetron sputtering targets+ a pair of twin (MF)magnetron sputtering targets |
Power source | Electric arc power, DC magnetron power, MF magnetron power, filament power, pulse power, linear ionized source. | ||
Process gas control | Quality flowmeter + electromagnetism ceramic valve | ||
Vacuum chamber structure | Vertical single(side) door, pump system postposition, double water-cooling | ||
Vacuum system | Molecule pump +Roots pump +Mechanical pump(5.0*10-5Pa) Diffusion pump +Roots pump +Mechanical pump(5.0*10-4Pa) |
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Workpiece baking temperature |
Normal temperature to 350 centi-degree PID control, radiation heating. |
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Workpiece motion mode | Public rotation Frequency control: 0-20 rotation per minute | ||
Measure mode | Number display composite vacuum gauge: from atmosphere to 1.0*10-5Pa | ||
Control mode | Manual/Automatic/PC/PLC + HMI/PC four choice of control mode | ||
Remark | We can design the dimension of the equipment according to customer's special technique requirement. |
Model (customerize) |
HCCA-1215 | HCCA-1818 | HCCA-2236 | HCCA-2545 | HCCA-2270 |
Dimension | D1250*H1500mm | D1800*H1800mm | D2200*H3600mm | D2500*H4500mm | D2200*H7000mm |
Loading ability | 1000*1300mm MAX | 1500*1500mm MAX | Sheet:1250*2500mm 4 pieces/Batch |
Sheet:1250*2500mm 6 pieces/Batch |
Sheet:1250*2500mm 10 pieces/Batch |
Machine Size | L5*W5*H2M | L6*W6*H2.5M | L6*W8*H11.5M | L8*W8*H12.5M | L20*W8*H2.5M |
Power source | Electric-arc power, Filament power, Pulsed bias power supply | ||||
Process gas control | Mass flowmeter + Electromagnetic ceramic valve | ||||
Vacuum chamber structure |
Vertical top opening door or Horizontal open front door, pump system postposition, double water cooling | ||||
Vacuum system | Diffusion pump +Roots pump +Mechanical pump(5.0*10-4Pa) | ||||
Workpiece baking temperature | Normal temperature to 350 centi-degree PID control, radiation heating. | ||||
Workpiece motion mode | Public rotation Frequency control: 0-20 rotation per minute | ||||
Measure mode | Number display composite vacuum gauge: from atmosphere to 1.0*10-5Pa | ||||
Control mode | Manual/Automatic/PC/PLC + HMI/PC four choice of control mode | ||||
Remark | We can design the dimension of the equipment according to customer's special technique requirement. |
Workshop: